On the opportunity of spectroscopic determination of absolute atomic densities in non-equilibrium plasmas from measured relative intensities within resonance multiplets distorted by self-absorption

摘要

The opportunities of the application of the recently proposed approach inoptical emission spectroscopy of non-equilibrium plasmas have been studied. Theapproach consists of several methods of the determination of {\em absolute}particle densities of atoms from measured {\em relative} intensities withinresonance multiplets distorted by self-absorption. All available spectroscopicdata concerning resonance spectral lines of atoms having multiplet groundstates from boron up to gallium were analyzed. It is found that in the case ofC, O, F, S and Cl atoms an application of the methods needs VUV technique,while densities of B, Al, Si, Sc, Ti, V, Co, Ni, Ga atoms may be obtained bymeans of the intensity measurements in UV and visible parts of emission spectrasuitable for ordinary spectrometers used for optical diagnostics and monitoringof non-equilibrium plasmas including industrial plasma technologies.